Interferometric Quantitative Phase Microscopy for Nanometrology Applications

周仁杰 副教授

2025年6月27日（星期五）15:00

Interferometric quantitative phase microscopy (iQPM) is a promising technique for nanometrology by offering high measurement precision and throughput. I will first highlight our recent advances in iQPM and their applications on characterization of micron and nano structures. Then, I will introduce our development of high spatiotemporal resolution synthetic aperture phase microscopy that can profile embedded sub-diffraction grating structures at video rate. After that, I will present our results on pushing the phase sensitivity limit to ~2 picometers, which laid the foundation for developing quantitative phase profilometry that can precisely map the thickness maps of single layer 2D materials. Finally, I will show our work on high-speed 3D iQPM and its deployment for in situ characterization of 3D-printed structures through two-photon polymerization.

Renjie Zhou is an Associate Professor in the Department of Biomedical Engineering at CUHK, where he directs Laser Metrology and Biomedicine (LAMB) Laboratory. He received a PhD degree in Electrical and Computer Engineering from the University of Illinois at Urbana-Champaign in 2014, followed by a postdoctoral training at MIT before joining CUHK in 2017. His research interest is mainly in quantitative phase imaging and optical diffraction tomography and their applications. He has published > 60 journal papers, including Nature Photonics, Light: Science & Applications, Advanced Photonics, Lasers & Photonics Review as the first/corresponding author, as well as filed > 10 International/US/China patents with several licensed to industry. He has been involved in organizing > 20 international conferences as co-chairs/committee members, delivered >40 conference invited talks and seminars/colloquiums, and reviewed >30 international journals. He is currently serving on the editorial boards of JOSA A, IEEE Photonics Technology Letters, and International Journal of Extreme Manufacturing. During 2023-2024, he served as the Assistant Dean (Research) of the Faculty of Engineering at CUHK. He is a Senior Member of Optica and SPIE. He received the Croucher Innovation Awards in 2019 from the Croucher Foundation and the Excellent Young Scientists Fund from National Natural Science Foundation of China in 2024.

撰写：任露洋

排版：陈仕发

一审一校：任露洋

二审二校：马将

三审三校：郑纯